Real time system for monitoring the commonality, sensitivity, and repeatability of test probes
US7856332B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2007 |
| Grant date | Dec 21, 2010 |
| Priority date | — |
| Expiry date | Jan 30, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2886
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and a method for effectively determining the measurement sensitivity, repeatability, and probe commonality to assist a test engineer determine if the tester meets the specified resolution at every test. A statistical measurement of inherent tester specifications are provided with the added accumulation of the probe contact resistance during the probing process. It further provides a feedback to the test probe card noise level while testing is in progress. Moreover, the system and the method determine the test probing integrity in-situ when testing integrated circuit chips or wafers, dynamically detecting probing errors, and modifying data associated with defective test probes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.