Patent · US Active

Method for manufacturing a sensor array including a monolithically integrated circuit

US7858424B2 · kind B2 · utility

0Cited by

1References

6Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Hubert Benzel · Neckartenzlingen, DE
Simon Armbruster · Wannweil, DE

Key dates

Filing date	Sep 25, 2006
Grant date	Dec 28, 2010
Priority date	—
Expiry date	Sep 25, 2026

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0742
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for producing a sensor array including a monolithically integrated circuit is described as well as a sensor array. This sensor array has a micromechanical sensor structure, in which a first partial structure which is associated with the sensor structure is produced at the same time as a second partial structure which is associated with the circuit, a process variation of the first partial structure being performed in order to adjust a structure property of the sensor structure while the second partial structure remains the same.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.