Method and apparatus for MEMS oscillator
US7863697B2 · kind B2 · utility
3Cited by
10References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2007 |
| Grant date | Jan 4, 2011 |
| Priority date | — |
| Expiry date | Dec 12, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02519
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.