Patent · US Active

Front opening substrate container with bottom plate

US7866480B2 · kind B2 · utility

7Cited by

9References

20Claims

0Family size

Assignee

ENTEGRIS, INC. · US

Inventors

John Burns · Colorado Springs, US
Matthew A. Fuller · Colorado Springs, US
Jeffery J. King · Cocoa, US
Martin L. Forbes · Divide, US
Mark V. Smith · Colorado Springs, US

Key dates

Filing date	Apr 10, 2007
Grant date	Jan 11, 2011
Priority date	—
Expiry date	Aug 26, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S206/832
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.