Temperature control system and substrate processing apparatus
US7870751B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2006 |
| Grant date | Jan 18, 2011 |
| Priority date | — |
| Expiry date | Nov 9, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
A temperature control system and a substrate processing apparatus are provided. The temperature control system for controlling temperatures of one or more members of a substrate processing apparatus includes a circulation system for circulating a first coolant to pass through the inside of each of the members, a heat exchanger for performing heat exchange between the first coolant of the circulation system and a second coolant, and a chiller for supplying the second coolant to the heat exchanger, wherein the circulation system includes a branch line for each of the members passing through the inside thereof, the branch line for each of the members is provided with a heating member for heating the first coolant supplied thereto, and the heat exchanger is installed in a room where the substrate processing apparatus is installed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.