Patent · US Active

Focusing-device for the radiation from a light source

US7871171B2 · kind B2 · utility

0Cited by

9References

67Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Martin Antoni · Aalen, DE
Frank Melzer · Utzmemmingen, DE
Andreas Seifert · Aalen, DE
Wolfgang Singer · Aalen, DE

Key dates

Filing date	Jul 15, 2008
Grant date	Jan 18, 2011
Priority date	—
Expiry date	Jul 8, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG02B27/30
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.