Substrate alignment apparatus comprising a controller to measure alignment during transport
US7880155B2 · kind B2 · utility
12Cited by
14References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2006 |
| Grant date | Feb 1, 2011 |
| Priority date | — |
| Expiry date | Jun 15, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01V8/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate processing apparatus has a substrate transport apparatus for transporting substrates, a sensor, and a control system. The processing apparatus is adapted to effect relative movement between the substrate and the sensor. The processing apparatus is further adapted to determine a position of the substrate by sensing the substrate with the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.