Recipe parameter management system and recipe parameter management method
US7885789B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 27, 2009 |
| Grant date | Feb 8, 2011 |
| Priority date | — |
| Expiry date | Apr 27, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In operation to obtain an optimal observation condition in a review system, the number of trial reviews can be reduced to improve efficiency of the operation. For a defect review conducted by the review system, a recipe parameter management system stores, as recipe parameter setting history in a recipe parameter setting history database (DB), a recipe parameter setting values of recipe parameters set when the defect review is conducted, the number of trial reviews carried out until the recipe parameter setting values are set, and defect images obtained when the defect review is conducted. The apparatus displays, on a terminal, histograms and the numbers of trial reviews generated based on the recipe parameter setting history data stored in the recipe parameter setting history database (DB). Hence, the operator can easily obtain data regarding the recipe parameter setting in the past.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.