Dual-mode mass flow verification and mass flow delivery system and method
US7891228B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 18, 2008 |
| Grant date | Feb 22, 2011 |
| Priority date | — |
| Expiry date | Nov 18, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0647
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system performs mass flow delivery of a fluid, and also performs mass flow verification of the fluid. The system includes an inlet valve that controls flow of the fluid into a chamber, an outlet valve that controls flow of the fluid out of the chamber, a pressure transducer that measures the pressure of the fluid within the chamber, a temperature sensor that measures the temperature of the fluid within the chamber, and a controller. The controller is configured to control opening and closing of the inlet and outlet valves, using the measurements of the pressure and the temperature change within the chamber, so as to verify, when in a first mode, a measurement of the flow rate of the fluid by a device, and so as to deliver, when in a second mode, a desired amount of the fluid from the chamber into a processing facility.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.