Sulfonium compound

US7897821B2 · kind B2 · utility

Assignee

• JSR CORPORATION · JP

Inventors

• Tomoki Nagai · Somalomo, CM
• Eiji Yoneda · Yokkaichi, JP
• Takuma Ebata · Tokyo, JP
• Takanori Kawakami · Yokohama, JP
• Makoto Sugiura · Tokyo, JP
• Tsutomu Shimokawa · Tokyo, JP
• Makoto Shimizu · Yokohama, JP

Key dates

• Filing date: Aug 31, 2010
• Grant date: Mar 1, 2011
• Expiry date: Aug 31, 2030

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/0397
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

A compound is shown by the following formula (5) in which at least one of Rf groups represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A′ represents a substituted or unsubstituted, linear or branched alkylene group having 1 to 20 carbon atoms, an alkylene group having at least one hetero atom, or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents an onium cation, m represents a natural number of 1 to 3, and p represents a natural number of 1 to 8.