Inventor · Tokyo, JP

Takuma Ebata

7Patents
3h-index
10Co-inventors
46Inventor score

Filing activity: May 11, 2006 → Aug 31, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US7812105B2 Compound, polymer, and radiation-sensitive composition Physics 21 Active
US7897821B2 Sulfonium compound Physics 12 Active
US7956142B2 Polymerizable sulfonic acid onium salt and resin Physics 9 Active
US8440384B2 Compound, salt, and radiation-sensitive resin composition Chemistry; Metallurgy 2 Active
US8431324B2 Radiation-sensitive resin composition Physics 1 Active
US8026039B2 Radiation-sensitive resin composition Emerging Cross-Sectional Technologies 1 Active
US8273837B2 Compound, polymer, and resin composition Chemistry; Metallurgy 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.