Patent · US Active

Probe for testing a device under test

US7898273B2 · kind B2 · utility

7Cited by
1,022References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 17, 2009
Grant dateMar 1, 2011
Priority date—
Expiry dateFeb 24, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/06738
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A probe measurement system for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.