Interface for testing semiconductors
US7898281B2 · kind B2 · utility
8Cited by
1,176References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2008 |
| Grant date | Mar 1, 2011 |
| Priority date | — |
| Expiry date | Dec 12, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes an imaging device for capturing a video sequence and a display for displaying the video in a window of the display and effectively positioning a probe relative to probe pads of a device under test for testing a semiconductor wafer supported by a support of a probing environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.