Patent · US Active

Collimator arrangements including multiple collimators and implementation methods thereof

US7907260B2 · kind B2 · utility

1Cited by
2References
35Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 29, 2007
Grant dateMar 15, 2011
Priority date—
Expiry dateJan 12, 2030

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/30
  • WIPO fieldChemical engineering
  • WIPO sectorChemistry

Abstract

A method for optical interrogation of plasma during plasma processing in a plasma processing chamber is provided. The method includes providing an optical viewport. The method also includes providing a collimator arrangement. The collimator arrangement is configured with a plurality of collimators, wherein a first collimator of the plurality of collimators is separated by a connecting region from a second collimator in the plurality of collimators. The method further includes collecting optical signals, through the collimator arrangement, from the plasma within the plasma processing chamber while a substrate is being processed, resulting in highly collimated optical signals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.