Eric A. Pape
38Patents
7h-index
60Co-inventors
68Inventor score
Filing activity: Aug 15, 2002 → Oct 21, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6813097B2 | Lenses capable of post-fabrication modulus change | Physics | 48 | Expired |
| US8522716B2 | Protective coating for a plasma processing chamber part and a method of use | Electricity | 20 | Active |
| US8852964B2 | Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis | Electricity | 14 | Active |
| US10049948B2 | Power switching system for ESC with array of thermal control elements | Electricity | 11 | Active |
| US8144328B2 | Methods and apparatus for normalizing optical emission spectra | Physics | 10 | Active |
| US7884925B2 | Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materials | Electricity | 9 | Active |
| US8358416B2 | Methods and apparatus for normalizing optical emission spectra | Physics | 9 | Active |
| US9779974B2 | System and method for reducing temperature transition in an electrostatic chuck | Electricity | 6 | Active |
| US10340171B2 | Permanent secondary erosion containment for electrostatic chuck bonds | Electricity | 5 | Active |
| US9012243B2 | Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basis | Electricity | 4 | Active |
| US8473089B2 | Methods and apparatus for predictive preventive maintenance of processing chambers | Electricity | 4 | Active |
| US7952694B2 | Optical system and methods for monitoring erosion of electrostatic chuck edge bead materials | Electricity | 3 | Active |
| US11430688B2 | Two-stage pin lifter for de-chuck operations | Electricity | 2 | Active |
| US10690414B2 | Multi-plane heater for semiconductor substrate support | Electricity | 2 | Active |
| US10381248B2 | Auto-correction of electrostatic chuck temperature non-uniformity | Electricity | 1 | Active |
| US10707110B2 | Matched TCR joule heater designs for electrostatic chucks | Electricity | 1 | Active |
| US7907260B2 | Collimator arrangements including multiple collimators and implementation methods thereof | Physics | 1 | Active |
| US9922855B2 | Method for reducing temperature transition in an electrostatic chuck | Electricity | 1 | Active |
| US10770363B2 | Power switching system for ESC with array of thermal control elements | Electricity | 1 | Active |
| US10096506B2 | Reducing temperature transition in a substrate support | Electricity | 1 | Active |
| US9543171B2 | Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element | Electricity | 1 | Active |
| US10186437B2 | Substrate holder having integrated temperature measurement electrical devices | Electricity | 1 | Active |
| US9716022B2 | Method of determining thermal stability of a substrate support assembly | Electricity | 1 | Active |
| US10522377B2 | System and method for substrate support feed-forward temperature control based on RF power | Electricity | 1 | Active |
| US10306776B1 | Substrate processing system printed-circuit control board assembly with one or more heater layers | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.