Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space
US7925390B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2007 |
| Grant date | Apr 12, 2011 |
| Priority date | — |
| Expiry date | Jun 18, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B30/70
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.