Patent · US Active

Method of forming TEM sample holder

US7935937B2 · kind B2 · utility

5Cited by

11References

30Claims

0Family size

Assignee

Omniprobe, Inc. · US

Inventors

Thomas M. Moore · Dallas, US
Gonzalo Amador · Dallas, US
Lyudmila Zaykova-Feldman · Dallas, US

Key dates

Filing date	Feb 24, 2009
Grant date	May 3, 2011
Priority date	—
Expiry date	Oct 30, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31749
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A TEM sample holder is formed from at least one nano-manipulator probe tip and a TEM sample holder pre-form. The probe tip is permanently attached to the TEM sample-holder pre-form to create a TEM sample holder before attachment of a sample to the point of the probe tip inside a FIB. In the preferred embodiment the probe tip is attached to the TEM sample holder pre-form by applying pressure to the pre-form and the probe tip, so as to cause plastic flow of the pre-form material about the probe tip. The TEM sample holder may have smaller dimensions than the TEM sample holder pre-form; in this case the TEM sample holder is cut from the larger TEM sample holder pre-form, preferably in the same operation as attaching the probe tip.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.