Radial line slot antenna having a conductive layer
US7938081B2 · kind B2 · utility
10Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2006 |
| Grant date | May 10, 2011 |
| Priority date | — |
| Expiry date | Jun 2, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32247
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A radial line slot antenna (RLSA) is described for generating plasma during semiconductor device fabrication. The antenna comprises a resonator plate having a partially open, electrically conductive layer coupled to a surface of the resonator plate. For example, the electrically conductive layer is formed at an interface between the resonator plate and the plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.