Lee Chen
92Patents
15h-index
41Co-inventors
80Inventor score
Filing activity: Mar 30, 2000 → May 18, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7138767B2 | Surface wave plasma processing system and method of using | Electricity | 337 | Expired |
| US8415884B2 | Stable surface wave plasma source | Electricity | 239 | Active |
| US6852584B1 | Method of trimming a gate electrode structure | Electricity | 123 | Expired |
| US8747610B2 | Plasma source pumping and gas injection baffle | Electricity | 74 | Active |
| US8083961B2 | Method and system for controlling the uniformity of a ballistic electron beam by RF modulation | Electricity | 48 | Active |
| US7396431B2 | Plasma processing system for treating a substrate | Electricity | 43 | Expired |
| US7777179B2 | Two-grid ion energy analyzer and methods of manufacturing and operating | Electricity | 41 | Active |
| US8460567B2 | Method and system for etching a MEM device | Electricity | 38 | Active |
| US9799494B2 | Energetic negative ion impact ionization plasma | Electricity | 37 | Active |
| US9209032B2 | Electric pressure systems for control of plasma properties and uniformity | Electricity | 36 | Active |
| US6809310B2 | Accelerated ion beam generator | Electricity | 32 | Expired |
| US8968588B2 | Low electron temperature microwave surface-wave plasma (SWP) processing method and apparatus | Electricity | 22 | Active |
| US7732759B2 | Multi-plasma neutral beam source and method of operating | Electricity | 19 | Active |
| US7993937B2 | DC and RF hybrid processing system | Electricity | 17 | Active |
| US7875859B2 | Ion energy analyzer and methods of manufacturing and operating | Electricity | 16 | Active |
| US7713758B2 | Method and apparatus for optimizing a gate channel | Electricity | 15 | Active |
| US6512333B2 | RF-powered plasma accelerator/homogenizer | Electricity | 14 | Expired |
| US8038834B2 | Method and system for controlling radical distribution | Electricity | 10 | Active |
| US7938081B2 | Radial line slot antenna having a conductive layer | Electricity | 10 | Active |
| US7718030B2 | Method and system for controlling radical distribution | Electricity | 10 | Active |
| US9396900B2 | Radio frequency (RF) power coupling system utilizing multiple RF power coupling elements for control of plasma properties | Electricity | 10 | Active |
| US7899637B2 | Method and apparatus for creating a gate optimization evaluation library | Electricity | 9 | Active |
| US7781340B2 | Method and system for etching high-k dielectric materials | Electricity | 9 | Active |
| US8877080B2 | Using vacuum ultra-violet (VUV) data in microwave sources | Electricity | 9 | Active |
| US7998307B2 | Electron beam enhanced surface wave plasma source | Electricity | 8 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.