Patent · US Active

System for testing semiconductors

US7940069B2 · kind B2 · utility

9Cited by

1,179References

10Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Peter Andrews · Tigard, US
David Hess · Gatineau, CA

Key dates

Filing date	Dec 15, 2009
Grant date	May 10, 2011
Priority date	—
Expiry date	Dec 15, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A testing system that includes an plural imaging devices capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.