User interface for wafer data analysis and visualization
US7945085B2 · kind B2 · utility
0Cited by
18References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 3, 2010 |
| Grant date | May 17, 2011 |
| Priority date | — |
| Expiry date | May 3, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer viewer system is provided for graphical presentation and analysis of a wafer and a wafer series. More specifically, the wafer viewer system includes a graphical user interface for displaying a wafer, graphically selecting regions of the wafer for analysis, performing analysis on the selected regions of the wafer, and displaying results of the analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.