Apparatus and method for removing bubbles from a process liquid

US7947158B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Helge Hartz · Volkersdorf, DE
• Markus Nopper · Dresden, DE
• Axel Preusse · Radebeul, DE

Key dates

• Filing date: Sep 25, 2009
• Grant date: May 24, 2011
• Expiry date: Sep 25, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/2885
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The present invention is directed to methods and apparatuses for removing bubbles from a process liquid. The process liquid can comprise a plating solution used in a plating tool. The process liquid is supplied to a tank. A plurality of streams of the process liquid are directed towards a surface of the process liquid from below. This can be done by feeding the process liquid to a flow distributor comprising a plurality of openings providing flow communication between an inner volume of the flow distributor and a main volume of the tank. Before leaving the tank through an outlet, the process liquid flows through a flow barrier.