Patent · US Active

Illuminator for a lithographic apparatus and method

US7952685B2 · kind B2 · utility

0Cited by

2References

24Claims

0Family size

Assignees

Carl Zeiss SMT GmbH · DE
ASML NETHERLANDS B.V. · NL

Inventors

Michel Fransois Hubert Klaassen · Eindhoven, NL
Hendrikus Robertus Marie Van Greevenbroek · Eindhoven, NL
Bernd Geh · Scottsdale, US
Emil Peter Schmitt-Weaver · Eindhoven, NL

Key dates

Filing date	Mar 15, 2007
Grant date	May 31, 2011
Priority date	—
Expiry date	Aug 16, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70566
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An illuminator for a lithographic apparatus, the illuminator including an illumination mode defining element and a plurality of polarization modifiers, the polarization modifiers being moveable into or out of partial intersection with a radiation beam having an angular and spatial distribution as governed by an illumination mode defining element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.