Polymerizable sulfonic acid onium salt and resin
US7956142B2 · kind B2 · utility
9Cited by
1References
4Claims
0Family size
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Key dates
| Filing date | Nov 9, 2007 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Nov 9, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0392
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body.wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.