Semiconductor devices and methods of manufacture thereof
US7960811B2 · kind B2 · utility
1Cited by
0References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2008 |
| Grant date | Jun 14, 2011 |
| Priority date | — |
| Expiry date | Feb 16, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Capacitor plates, capacitors, semiconductor devices, and methods of manufacture thereof are disclosed. In one embodiment, a capacitor plate includes at least one via and at least one conductive member coupled to the at least one via. The at least one conductive member comprises an enlarged region proximate the at least one via.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.