Method and apparatus for substrate imaging
US7969465B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2006 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Mar 3, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N7/188
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The invention provides a substrate surface imaging method and apparatus that compensates for non-linear movement of the substrate surface during an imaging sequence. In one aspect of the invention, the imaging method and apparatus compensate for the non-linear substrate surface movement by adjusting the image receiver trigger points to correspond to image positions on the substrate surface. In another aspect, the invention provides synchronous imaging where the distance between each image position is determined by counting the number of stepper motor steps between image positions. In still another aspect, the invention provides for asynchronous substrate imaging by determining an image trigger time between each image position and using the image trigger time to trigger the receiver at the appropriate time to accurately image the substrate surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.