Methods and apparatus for improving operation of an electronic device manufacturing system
US7970483B2 · kind B2 · utility
5Cited by
41References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2007 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Mar 14, 2027 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B49/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
In one aspect of the invention, a method for the improved operation of an electronic device manufacturing system is provided. The method includes providing information to an interface coupled to an electronic device manufacturing system having parameters, processing the information to predict a first parameter, and providing an instruction related to at least a second parameter of the electronic device manufacturing system wherein the instruction is based on the predicted first parameter. Numerous other aspects are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.