Workpiece support with fluid zones for temperature control
US7972444B2 · kind B2 · utility
11Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2007 |
| Grant date | Jul 5, 2011 |
| Priority date | — |
| Expiry date | Jan 22, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67248
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.