Jonathan D. Mohn
16Patents
9h-index
40Co-inventors
72Inventor score
Filing activity: Jul 14, 1997 → Jul 11, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6379575B1 | Treatment of etching chambers using activated cleaning gas | Emerging Cross-Sectional Technologies | 289 | Expired |
| US6095084A | High density plasma process chamber | Electricity | 140 | Expired |
| US6401652B1 | Plasma reactor inductive coil antenna with flat surface facing the plasma | Electricity | 24 | Expired |
| US7011039B1 | Multi-purpose processing chamber with removable chamber liner | Electricity | 23 | Expired |
| US7042619B1 | Mirror structure with single crystal silicon cross-member | Physics | 23 | Expired |
| US9719169B2 | System and apparatus for flowable deposition in semiconductor fabrication | Emerging Cross-Sectional Technologies | 19 | Active |
| US9184072B2 | Advanced multi-workpiece processing chamber | Emerging Cross-Sectional Technologies | 13 | Active |
| US7972444B2 | Workpiece support with fluid zones for temperature control | Electricity | 11 | Active |
| US9121097B2 | Variable showerhead flow by varying internal baffle conductance | Electricity | 9 | Active |
| US6598615B1 | Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber | Emerging Cross-Sectional Technologies | 8 | Expired |
| US9916977B2 | Low k dielectric deposition via UV driven photopolymerization | Electricity | 7 | Active |
| US9728380B2 | Dual-plenum showerhead with interleaved plenum sub-volumes | Electricity | 6 | Active |
| US7369297B2 | Mirror structure with single crystal silicon cross-member | Physics | 2 | Expired |
| US10388546B2 | Apparatus for UV flowable dielectric | Electricity | 2 | Active |
| US7355781B2 | Spatial light modulator with perforated hinge | Physics | 1 | Active |
| US11270896B2 | Apparatus for UV flowable dielectric | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.