Thick field oxide termination for trench schottky device
US7973381B2 · kind B2 · utility
11Cited by
13References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 8, 2004 |
| Grant date | Jul 5, 2011 |
| Priority date | — |
| Expiry date | Oct 27, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/117
Abstract
A schottky diode of the trench variety which includes a trench termination having a thick insulation layer that is thicker than the insulation layer inside the trenches in its active region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.