Lift pin driving device and a flat panel display manufacturing apparatus having same
US7988817B2 · kind B2 · utility
37Cited by
6References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 18, 2007 |
| Grant date | Aug 2, 2011 |
| Priority date | — |
| Expiry date | Jan 26, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/2101
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A lift pin driving device and a flat panel display (FPD) manufacturing apparatus having the device are provided. The lift pin driving device can precisely move a plurality of lift pins using one motor, thus realizing a simple lift pin driving structure and a simple motor control structure. This allows a space below a chamber body of the manufacturing apparatus to be configured in a variety of ways, thus reducing the cost of equipment and the production cost of products.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.