System and method for modulation mapping
US7990167B2 · kind B2 · utility
9Cited by
71References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 31, 2009 |
| Grant date | Aug 2, 2011 |
| Priority date | — |
| Expiry date | Jul 31, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.