Apparatus for multiple frequency power application
US7994872B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2009 |
| Grant date | Aug 9, 2011 |
| Priority date | — |
| Expiry date | Jan 29, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H7/38
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Apparatus and methods are provided for a power matching apparatus for use with a processing chamber. In one aspect of the invention, a power matching apparatus is provided including a first RF power input coupled to a first adjustable capacitor, a second RF power input coupled to a second adjustable capacitor, a power junction coupled to the first adjustable capacitor and the second adjustable capacitor, a receiver circuit coupled to the power junction, a high voltage filter coupled to the power junction and the high voltage filter has a high voltage output, a voltage/current detector coupled to the power junction and a RF power output connected to the voltage/current detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.