Multi-axis magnetic lens
US8003953B2 · kind B2 · utility
9Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2009 |
| Grant date | Aug 23, 2011 |
| Priority date | — |
| Expiry date | Apr 27, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/1405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.