MEMS resonator devices with a plurality of mass elements formed thereon

US8004372B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Bernhard Winkler · Birkenfeld, DE
• Mohsin Nawaz · Itasca, US
• Florian Schoen · Altdorf, DE

Key dates

• Filing date: Jan 15, 2009
• Grant date: Aug 23, 2011
• Expiry date: Dec 21, 2029

Classification

• Technology area (CPC —): General

Abstract

The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.