Method for beam calibration and usage of a calibration body

US8009299B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Matthias Brunner · Tauberbischofsheim, DE
• Ralf Schmid · Karlsruhe, DE
• Bernhard Mueller · Finsing, DE
• Axel Wenzel · Augsburg, DE

Key dates

• Filing date: Jan 5, 2006
• Grant date: Aug 30, 2011
• Expiry date: Apr 19, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/2826
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a method of calibration of the beam position of a corpuscular beam. A calibration body with structures is used, wherein the structures have a structure period PS in the plain section and within each structure there is a position L intended for the measurement. For the calibration, at least one detection signal each at structures in the plain section of the calibration body is generated, wherein the corpuscular beam is deflected with deflectors on beam target positions L1 with the beam target period P1, which is larger than half of the structure period PS, whereby a basic calibration is used for the control of the deflectors, and wherein the beam target deflections deviate either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the position L.