Patent · US Active

Metrics independent and recipe independent fault classes

US8010321B2 · kind B2 · utility

14Cited by

22References

29Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Y. Sean Lin · Irvine, US
William Clements · Austin, US
Alexander T. Schwarm · Austin, US

Key dates

Filing date	May 4, 2007
Grant date	Aug 30, 2011
Priority date	—
Expiry date	Dec 15, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG05B2219/37519
WIPO fieldControl
WIPO sectorInstruments

Abstract

A method and apparatus for diagnosing faults. Process data is analyzed using a first metric to identify a fault. The process data was obtained from a manufacturing machine running a first recipe. A fault signature that matches the fault is identified. The identified fault signature was generated using a second metric and/or a second recipe. At least one fault class that is associated with the fault signature is identified.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.