Cleaning device and a lithographic apparatus cleaning method
US8011377B2 · kind B2 · utility
0Cited by
75References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2008 |
| Grant date | Sep 6, 2011 |
| Priority date | — |
| Expiry date | Apr 11, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B2203/0288
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.