Bauke Jansen
18Patents
5h-index
37Co-inventors
62Inventor score
Filing activity: Jul 22, 2004 → Nov 19, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9405205B2 | Lithographic apparatus and in-line cleaning apparatus | Physics | 17 | Active |
| US7841352B2 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Physics | 5 | Active |
| US8243255B2 | Lithographic apparatus and in-line cleaning apparatus | Physics | 5 | Active |
| US7866330B2 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Physics | 5 | Active |
| US7900641B2 | Cleaning device and a lithographic apparatus cleaning method | Physics | 5 | Active |
| US8730447B2 | Lithographic apparatus and method of operating the apparatus with a humid gas space between a projection system and a liquid confinement structure | Physics | 3 | Active |
| US9785061B2 | Lithographic apparatus and in-line cleaning apparatus | Physics | 3 | Active |
| US9036128B2 | Lithographic apparatus and in-line cleaning apparatus | Physics | 2 | Active |
| US9176371B2 | Immersion lithographic apparatus with a barrier between a projection system and a liquid confinement structure | Physics | 2 | Active |
| US10151984B2 | Lithographic apparatus and a method of operating the apparatus | Physics | 0 | Active |
| US8094287B2 | Lithographic appararus and method | Physics | 0 | Active |
| US9013672B2 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Physics | 0 | Active |
| US8011377B2 | Cleaning device and a lithographic apparatus cleaning method | Performing Operations; Transporting | 0 | Active |
| US8564757B2 | Lithographic apparatus and a method of operating the apparatus | Physics | 0 | Active |
| US7446849B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Expired |
| US8947629B2 | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method | Physics | 0 | Active |
| US10429741B2 | Lithographic apparatus and a method of operating the apparatus | Physics | 0 | Active |
| US7649702B2 | Immersion lithography objective | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.