Patent · US Active

Folded lead-frame packages for MEMS devices

US8013404B2 · kind B2 · utility

4Cited by
6References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 9, 2008
Grant dateSep 6, 2011
Priority date
Expiry dateAug 25, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/3025
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

The MEMS package comprises a first and a second pre-molded lead-frame substrate, at least one of them having a cavity formed by plastic sidewalls along its periphery. The first and second pre-molded lead-frame substrates are interconnected with metal leads. At least one MEMS device is attached to one of the substrates. The first pre-molded lead-frame substrate is folded over and joined to the second pre-molded lead-frame substrate to house the at least one MEMS device. In one embodiment, the first pre-molded lead-frame substrate has metal leads extending outside of sidewalls of the cavities. The extended metal leads are folded over the top of the second pre-molded lead-frame substrate to form surface mounting pads. In some embodiments, extended metal leads are folded along the sidewalls and connected to ground for electromagnetic interference (EMI) shielding.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.