Patent · US Active

Double sided probing structures

US8013623B2 · kind B2 · utility

8Cited by

1,012References

5Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

Terry Burcham · Hillsboro, US
Peter McCann · Beaverton, US
Rod Jones · Gaston, US

Key dates

Filing date	Jul 3, 2008
Grant date	Sep 6, 2011
Priority date	—
Expiry date	Jul 3, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/0408
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.