Method and apparatus for dampening pressure fluctuations in a fluid delivery system
US8015989B2 · kind B2 · utility
0Cited by
9References
17Claims
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Key dates
| Filing date | Jun 9, 2008 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | Nov 6, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7922
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A method and apparatus are provided for a cost effective pressure dampening device used in a fluid delivery system for substrate processing. In one embodiment, the pressure dampening device is disposed between a mounting substrate and a control valve within a fluid control assembly in fluid communication with a substrate processing chamber. The pressure dampening device is capable of dampening small pressure perturbations in a process fluid which is used for substrate processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.