Method of removing contaminants from a coating surface comprising an oxide or fluoride of a group IIIB metal
US8016948B2 · kind B2 · utility
13Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2008 |
| Grant date | Sep 13, 2011 |
| Priority date | — |
| Expiry date | Sep 22, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed herein is a cleaning method useful in removing contaminants from a surface of a coating which comprises an oxide or fluoride of a Group III B metal. Typically the coating overlies an aluminum substrate which is present as part of a semiconductor processing apparatus. The coating typically comprises an oxide or a fluoride of Y, Sc, La, Ce, Eu, Dy, or the like, or yttrium-aluminum-garnet (YAG). The coating may further comprise about 20 volume % or less of Al2O3.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.