Patent · US Active

Ohmic contacts to nitrogen polarity GaN

US8021904B2 · kind B2 · utility

52Cited by
30References
28Claims
0Family size

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Inventor

Key dates

Filing dateJan 31, 2008
Grant dateSep 20, 2011
Priority date
Expiry dateJun 2, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/832

Abstract

Contacting materials and methods for forming ohmic contact to the N-face polarity surfaces of Group-III nitride based semiconductor materials, and devices fabricated using the methods. One embodiment of a light emitting diode (LED) a Group-III nitride active epitaxial region between two Group-III nitride oppositely doped epitaxial layers. The oppositely doped layers have alternating face polarities from the Group III and nitrogen (N) materials, and at least one of the oppositely doped layers has an exposed surface with an N-face polarity. A first contact layer is included on and forms an ohmic contact with the exposed N-face polarity surface. In one embodiment, the first contact layer comprises indium nitride.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.