Method of performing an operation with rheological compound
US8025542B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 14, 2007 |
| Grant date | Sep 27, 2011 |
| Priority date | — |
| Expiry date | Jul 26, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/351
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.