Silicone coating composition
US8026040B2 · kind B2 · utility
2Cited by
109References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2007 |
| Grant date | Sep 27, 2011 |
| Priority date | — |
| Expiry date | Oct 13, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08G77/06
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
The present invention relates to a composition comprising: where R1 is a non-hydrolysable group and n is an integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful in forming low k dielectric constant materials and as well as hard mask and underlayer materials with anti-reflective properties for the photolithography industry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.