Patent · US Active

Wafer handling system

US8028978B2 · kind B2 · utility

5Cited by

25References

19Claims

0Family size

Assignee

Semitool, Inc. · US

Inventors

Gordon Nelson · Kalispell, US
Jeffry Davis · Kalispell, US
Raymon F. Thompson · Kalispell, US
Eric J. Bergman · Kalispell, US

Key dates

Filing date	Mar 25, 2003
Grant date	Oct 4, 2011
Priority date	—
Expiry date	Apr 3, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S269/903
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A semiconductor wafer processing system has a carrier including wafer slots. A process robot engages the carrier and installs the carrier into a rotor within a process chamber. The rotor has a tapered or stepped inside surface matching a tapered or stepped outside surface of the carrier. Wafer retainers on the carrier pivot to better secure wafers within the carrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.