Contamination-inspecting apparatus and detection circuit
US8035071B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | May 7, 2008 |
| Grant date | Oct 11, 2011 |
| Priority date | — |
| Expiry date | Mar 20, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/1241
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The detection part has: a subtraction module for calculating correction data from data of detection systems when a reference-voltage generation module applies a reference voltage to the detection systems; a data-holding module for holding the correction data; an addition module for making a correction of detection data; a comparison module for comparing the detection data with switching data; and a selector for switching data of the detection systems including data subjected to the correction according to the output of the comparison module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.