Patent · US Active

MEMS resonator devices with a plurality of mass elements formed thereon

US8040207B2 · kind B2 · utility

6Cited by

13References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Bernhard Winkler · Birkenfeld, DE
Mohsin Nawaz · Itasca, US
Florian Schoen · Altdorf, DE

Key dates

Filing date	Jan 15, 2009
Grant date	Oct 18, 2011
Priority date	—
Expiry date	Dec 21, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/2431
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

The invention relates to MEMS devices. In one embodiment, a micro-electromechanical system (MEMS) device comprises a resonator element having a circumference, an anchor region, and a plurality of beam elements coupling the anchor region and the resonator element. Further embodiments comprise additional devices, systems and methods.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.