Surface defect data display and management system and a method of displaying and managing a surface defect data
US8041443B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 21, 2009 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Apr 28, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T70/5659
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A surface defect data display and management system comprises a risk score calculation unit for calculating the magnitude of an influence a surface defect on a wafer detected by a wafer inspection system or review system has upon a reduction in the yield of a final product as a risk score of the surface defect based on a defect size of the surface defect on the wafer and a pattern concentration obtained from design data of a pattern figure nearby a location corresponding to the position of the surface defect, and a correlation graph and defect image display unit for preparing a correlation graph showing the correlation between the defect size and the risk score of each defect, displaying the prepared correlation graph on the display apparatus and displaying additionally a defect image list of one or more defects selected by using the correlation graph.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.